Integrated thin films and applications
|Format:||Print Book 1998|
|Availability:||Available at 1 Library 1 of 1 copy|
Offers 21 selected papers from a May 1997 symposium, organized in two sections on film growth techniques and applications, and characterization and effects of processing conditions. Subjects include controlled growth of perovskite thin films, single crystal silicon as a micromechanical material, gro
|Series||Ceramic transactions ; v. 86.|
Ferroelectric thin films -- Congresses.
|Publisher|| Westerville, Ohio :American Ceramic Society,1998
Pandey, R. K.
Witter, David E.
American Ceramic Society. Meeting 1997 : Cincinnati, Ohio)
Symposium on Integrated Thin Films and Applications (1997 : Cincinnati, Ohio)
"Proceedings of the Symposium on Integrated Thin Films and Applications, held at the 99th Annual Meeting of the American Ceramic Society in Cincinnati, Ohio, May 4-7, 1997."--T.p. verso.
vii, 274 pages : illustrations ; 24 cm.
Includes bibliographical references and index.